M600 Automatic RSP Cleaner

The M600 fully-automatic central force cleaner is the perfect solution for the automatic cleaning of RSP150 or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned.


  • Fully-automated cleaning of RSP150 or RSP200
  • 所有光罩/晶圓載具的半自動清洗
  • 內部暫純區
  • IR 乾燥技術
  • 可切換半自動清洗模式
  • OHT 介面
  • Class 1 環境 及 ESD
  • SECS/GEM 介面符合SEMI Standard