The M1000 fully-automatic EUV pod cleaner provides maximum performance by individual cleaning of each EUV or RSP200 part.
Key Features
- High pressure DI-water spraying
- Lid and shell cleaning separated
- Vacuum decontamination for AMC compound removal
- IR drying technology
- N2/XCDA purge for load port
- OHT interface
- Class 1 mini-environment
- SEMI standard compliant SECS/GEM interface
