The RS family provides a fully automated reticle management system that combines a sorter with a stocker capacity up to 2900 reticles on a minimal footprint. The reticles are safely stored in Tec-Cell© modules ensuring an ISO class 1 micro environment with optional N2/xCDA purge.
The RS family supports a variety of different reticle cassettes including SMIF multi-pods (MRSP), SMIF mono-pods (RSP) as well as Nikon and Canon reticle cassettes.
Procedures, Forms & Templates, FAQ
Supplier Initiated Action Request (SIAR) web form.