The RPS-C is a fully automated standalone storage and inventory management system for reticle SMIF pods (RSP) with optional xCDA or N2 purge.
It is based on the Tec-Sem modular, cartesian product platform, allowing a high flexibility in storage size and load port configurations
The RPS-C is customizable in capacity and RSP interfaces
Procedures, Forms & Templates, FAQ
Supplier Initiated Action Request (SIAR) web form.