RPS-C Automated Storage and Management System for SMIF Pods

The RPS-C is a fully automated standalone storage and inventory management system for reticle SMIF pods (RSP) with optional xCDA or N2 purge.

It is based on the Tec-Sem modular, cartesian product platform, allowing a high flexibility in storage size and load port configurations

The RPS-C is customizable in capacity and RSP interfaces

重要特色

  • High availability and throughput of the RSP-C for optimum pod logistics
  • Links reticle room (offline area) and production environment, providing a defined work flow
  • Distributed storage in the production line

Various field-proven options available, such as:

  • Shelf purge
  • Manual load ports
  • OHT load ports / E84
  • Host interface